ANSWER B: the applications which are highlighted in the paper bulk micromachining silicon are usage of interhalogen etches, method of high aspect ratio dry etching and the applications which are highlighted in the paper silicon as a mechanical material are the continuous development of mechanical material, fabrications are being taken from the industry of semiconductor, processing techniques of low temperature like plasma-phase etching, disk storage technology, IC fabrication for the laser etching. Therefore, the given applications are being highlighted in both the papers.
ANSWER C: The applications in both the papers differ because in the bulk paper micromachining of silicon wet etching is used as a method of fabrication process because the purpose is to remove the eloquent amount of silicon from substrates, so the applications are used according to their techniques. Whereas in the paper silicon as a mechanical material different process of etching are used in order to alter the prevalent perception of miniature components, so the applications are used accordingly. And the difference is reflected in the manufacturing process because their objective or purpose are different which they want to achieve.
ANSWER D: The most promising application for MEMs in 2014-2020 can be the growth in the ‘global automotive’ MEMs sensors. It is expected that by the year 2020, it will expand around four percent in market coverage (Electroiq.com, 2016). Moreover, it is expected that MEMs will cover all the five senses, namely, sight (Image sensor, mirco-displays), balance (Inertial devices), hearing (microphones), smell (Gas Sensors), taste (Humiditiy sensors and electronic tongue), pressure (pressure sensors), and touch (force and touch sensors) (Bosch Seminar, 2015).
ANSWER B: MEMs are very different from micro-nanotechnology and the fields of MEMs are nano-electromechanical systems and nanotechnology. MEMs are also called as micromachines. The MEMs use semiconductor devices in order to make electronics. And MEMs will grow in the fields of telecommunication and medical devices with the help of technology. The expected growth is due to the three major features of MEMs, namely, development of microstructures that have challenging dimensions at the scale of nanometers, effective development of the mechanical parts that contribute to the motions and mechanical resonance, and the effective manipulation of electrical signals through various mechanisms.
Whereas, the impact of piezoresistive effect on micro silicon sensor is it reduces the negative impact on the sensors, and it is used to fabricate the elements of stress sensing. There are some reasons that could explain the difference in the market size. As silicon micro sensors have progressed so much from the past 30 years but there some of the dimensions of micro silicon sensors have not downsized with the time and the reduction of those dimensions cannot be done now, but the efforts are being made to downsize them. The thin film metal materials also raised which became the reason for integrated circuits to have a more market share than the micro silicon sensors. The usage of wet etching is also increasing by the industries, and this resulted in the difference in the market share of integrated circuits and silicon market share.
Kovacs, G., Maluf, N., & Petersen, K. (1998). Bulk micromachining of silicon. Proceedings Of The IEEE, 86(8), 1536-1551. http://dx.doi.org/10.1109/5.704259
Petersen, K. E. (1982). Silicon as a mechanical material. Proceedings of the IEEE, 70(5), 420-457.
Purlmutter, M. (2016). Retrieved 3 September 2016, from http://High-performance, low cost inertial MEMS: A market in motion!
Electroiq.com. (2016). Automotive MEMS sensors market to grow 6% from 2015-2020, P&S Market Research | Solid State Technology. [online] Available at: http://electroiq.com/blog/2015/10/automotive-mems-sensors-market-to-grow-6-from-2015-2020-ps-market-research/ [Accessed 4 Sep. 2016].
Bosch Seminar, (2015). What does the future hold for MEMS ?. Beiji